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Note that this is the second Tuesday!!

The Speaker

Ed Paul earned a B.A. in Chemistry from Brandeis University and a Ph.D. in Chemical Physics from the University of Oregon.  He was a postdoctoral fellow at the University of California-Santa Cruz and at the National Institutes of Health (NIH) before joining the chemistry faculty at Stockton College in 1972.  He has been a guest researcher at the National Institute of Standards and Technology (NIST) and at universities in Belgium, France and the Netherlands.  His scientific career has focused on first principle modeling of a variety of systems including metal-ammonia solutions, polymer hydrodynamics, protein unfolding kinetics, biomass production in salt marshes, and alloy phase diagrams.  In the past few years he has published papers on precision engineering, developing models to explain diamond wear in machine tools and chemical mechanical polishing.

Abstract

Chemical Mechanical Polishing (CMP) is a process used in the manufacture of computer chips to give smooth, planar surfaces.  It was first introduced in 1991 for tungsten, and has been applied to other metals (aluminum, copper and nickel) and to a variety of insulating materials (silicon dioxide, fluorine and organic doped glasses, and low k dielectrics formed from proprietary ring polymeric compounds.)  There are an estimated two to three dozen variables associated with the process, each of which can affect the polishing rate, surface smoothness, and planarity.  As a practical engineering concern, these variables may be adjusted to give desired outcomes.  However, the process has not been very well understood.  This talk will present a model to explain how the process works using an approach based on chemical kinetics mechanisms.  Examples from tungsten CMP will be used to illustrate the model results, and extensions of the model to other systems will be discussed.

The March meeting will be held at Adelphia Restaurant in Deptford.

The restaurant is located at 1750 Clements-Bridge Road, Deptford NJ 08096

From North Jersey, Philly, take I295 to exit 26, take Highway 42/Atlantic City Expressway south towards Atlantic City, and exit onto Highway 55. Take the first exit. Go left at the light and proceed to Clements-Bridge Road. Turn right. The restaurant is on the left side of the road and will require you to do a U-turn.

From Atlantic City, take the AC Express way to the Route 322 exit. Go through Rowan campus to route 55. Take Route 55 north to the Deptford Mall exit. Use directions above.

From Rowan, use Route 55 to go to the Deptford Mall, exit and then use the directions above.

Please call the restaurant at 856-845-8200 for directions if needed. You can also check their web site at www.adelphiarestaurant.com.

Dinner selections:


Special orders such as low-salt meals must be ordered in advance and may exceed the $20.00 price.

Please call or email your reservation by Friday, March 4. Be sure to indicate your dinner choice!

Martin Schneiderman, Schnema@jmusa.com
Reena Colacot, 609-919-3378 or reena.colacot@laureatepharma.com

The information on this page represents that of the South Jersey Section of the American Chemical Society and not necessarily that of Rowan University. Robert Newland, Councilor SJACS, takes full responsibility for the information presented.